Molecular Vacuum System
Molecular pump vacuum principle
Molecular pump mechanism pumping mechanism and mechanical pump by the pump suction cavity volume change is different, use the momentum transfer theory, the molecular orientation of the pump flow is discharged outside, so as to achieve the purpose of evacuation.
Molecular pump driven by the high-speed rotation of the motor, drive motor variable frequency power supply, the purpose is to get a higher speed. In the molecular flow region, the gas molecules to the surface of the blade with the high-speed collision, the momentum transfer to the gas molecules, so that part of the gas molecules in the direction of movement of the rigid body surface, generating directional flow is discharged outside the pump, so as to achieve the purpose of pumping . Usually with a rigid surface to carry high-speed movement of gas molecules, and make certain the direction of movement of the phenomenon known as molecular drag phenomenon, the use of a vacuum pump made of this phenomenon is called traction molecular pump (GED pump). Advantages traction molecular pump start-up time is short, the molecular flow state has a high compression ratio, can pump addition to a variety of gases and vapors, especially suitable for pumping heavy gases other. However, due to the traction molecular pumping speed small, sealed gap is too small, poor reliability, it is easy to fall out of machinery, and make it difficult, in fact, rarely used.
Molecular pump unit Description
Molecular pump unit can be based on the effective volume of users, the highest temperature, ultimate vacuum, the number of vent and size requirements for equipment use and appearance for specialized design and manufacturing.
Molecular pump unit uses
Molecular pump unit applications is very broad, mainly used in solar photovoltaic, LOW-E glass, semiconductor manufacturing, vacuum leak detection, vacuum coating, made light, compact discs, analytical instruments, construction, environmental protection, science and technology research and development and many other industries on the configuration.
Molecular pump unit is the use of high-speed rotation of the rotor of the momentum transfer to the gas molecules, and thus obtain the orientation speed, so as to be compressed, after being driven to the exhaust port for the first-stage Roots pump in row to take away a mechanical pump vacuum unit. Especially molecular pump main pump, as the ultra-high vacuum in the field of vacuum obtain equipment, because of its fast start, low energy consumption, long operating life, high reliability and availability of completely oil-free vacuum cleaner, etc., in recent years in vacuum technology the increasing popularity of applications.
Molecular pump unit compared with the diffusion pump units and other ultra-high vacuum pump has the following characteristics:
Wide operating pressure range, a stable pumping speed in the range of nine orders of magnitude;
Compact structure, the pump body disposed intermediate frequency direct drive motor rotor;
Extreme pressure low, the pump can be obtained advanced 10-8Pa limit pressure;
Work small vibration, low noise, smooth start-up time is short, high efficiency;
Small, pumping speed, high vacuum system to obtain clean oil-free;
Low energy consumption, save energy, a power-saving configuration.
Molecular pump unit related technical parameters (Chengdu Xin Nan Wende machinery and equipment companies internal data)
Ultimate vacuum: 8.0 × 10-5Pa
Working vacuum: 1.3 × 10-4Pa
Working Hours: 150h
Pumping speed: 3500L / S
Total power: 25KW
Pre-configuration: mechanical pump Roots pump
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